Gaussian Process Regression for Virtual Metrology of Microchip Quality and the Resulting Strategic Sampling Scheme APPROVED BY SUPERVISING COMMITTEE: Dragan Djurdjanovic, Supervisor Roman Garnett Gaussian Process Regression for Virtual Metrology of Microchip Quality and the Resulting Strategic Sampling Scheme
نویسنده
چکیده
منابع مشابه
Effect of Periodic Virtual Metrology Recalibration on Blended Metrology Schemes
Risk and cost must be balanced in the design of semiconductor processing metrology. More specifically, one needs to balance the cost of operating the metrology tool, and the loss in terms of processing cost and yield due to the limited sampling and the time lapse between the occurrence and the correction of a process fault. In virtual metrology (VM), the real-time data produced by the processin...
متن کاملGaussian Process Regression for Virtual Metrology of Plasma Etch
Plasma etch is a complex semiconductor manufacturing process in which material is removed from the surface of a silicon wafer using a gas in plasma form. As the process etch rate cannot be measured easily during or after processing, virtual metrology is employed to predict the etch rate instantly using ancillary process variables. Virtual metrology is the prediction of metrology variables using...
متن کاملAnalytical evaluation of an innovative decision-making algorithm for VM live migration
In order to achieve the virtual machines live migration, the two "pre-copy" and "post-copy" strategies are presented. Each of these strategies, depending on the operating conditions of the machine, may perform better than the other. In this article, a new algorithm is presented that automatically decides how the virtual machine live migration takes place. In this approach, the virtual machine m...
متن کاملImproving the quality of images synthesized by discrete cosines transform – regression based method using principle component analysis
Purpose: Different views of an individuals’ image may be required for proper face recognition. Recently, discrete cosines transform (DCT) based method has been used to synthesize virtual views of an image using only one frontal image. In this work the performance of two different algorithms was examined to produce virtual views of one frontal image. Materials and Methods: Two new meth...
متن کاملFood Quality Standards: Quality Issues and Challenges of Food Chain in Burkina Faso
Background: In Burkina Faso, the agricultural sector accounts for 35% of the gross domestic product (GDP) and employs 82% of the active population. The agri-food industries must apply the requirements of the management systems to improve their economic position and ensure sustainable development. The present study aimed to highlight the similarities and particularities of these repositories gro...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 2017